OFFICIAL TITLE · ENGLISH INDEX

T/CEPEA 0103-2024

半导体集成电路制造用原子层沉积设备

The official Chinese title is shown unchanged. Standard identifiers, dates and issuing bodies come from the catalogue record; navigation and explanatory labels are in English.

In forceRecommendedAssociation standard
Level
Association standard
Status
In force
Nature
Recommended
Issuing body
中国电子专用设备工业协会
Issued
2025-12-19
Effective
2026-01-01
Standard family
T/CEPEA 0103
Classification
ICS 23.160 真空技术 · 机械装备
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Version history

Earlier editions: T/CEPEA 0103-2023 In force

Later editions: None recorded

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